Sensors and Electron Devices Directorate Research Areas

Microdevice Technology

Advisor: Dubey, Madan (madan.dubey@us.army.mil 301-394-1186)
Keywords: Microelectronics; Micromechanics; Thin films; Microcrystals; Advanced materials; Microsystems; MEMS; NEMS; Bio-MEMS

This program encompasses research and development of electronics and RF devices, sensors, and actuators including modeling, simulation, processing, fabrication, prototyping, testing and characterization, failure analysis, prognostics, and diagnostics. Innovative and cutting edge research and technology in Nano-electromechanical system (NEMS), Micro-electromechanical system (MEMS), Micro-optomechanical and Micro-optoelectromechanical devices, acousto-electronic MEMS, and Micro Power are areas of major interest. Critical technology for intelligent system development involve frontiers in science and research to emulate biological systems in order to understand fundamentals and underlying basic physical mechanisms and engineering, bio-informatics, and bio-MEMS.

ARL is also very enthusiastic about the inventions and development of Micro Autonomous Systems and Technologies including Micro- and submicron-scale sensors, processors, secure, sensitive, and reliable micro-communications hardware integrated with low but high density power sources. Technology and research in Nano-Micro Robotics, Robotic Swarms, Micro Unattended Ground Sensors, Unattended Air Vehicles, Micro- and submicron-scale propulsion systems with acceptable durability and stability, guidance and control algorithms including Artificial Intelligence for nearly-autonomous systems with ability to fly, loiter, and move on surfaces are of immense importance.

We are investigating a new radical technology for monolithic and heterogeneous integration of electronic, acoustic, mechanical, optical, chemical, and biological device elements and functions at nano/micrometer scales for smart adaptive, flexible, multifunctional sensor arrays and actuator platforms. Emerging enabling MEMS and NEMS Technology Research Applications, as well as Nano-biotechnology for advanced bio-electronic and bio-magnetic materials is also a top priority research task.

Specific areas of interest include MEMS Integrated Circuit, Application Specific MEMS-IC, System-On-a-Chip, System-On-a-Package, Radio-Frequency (RF) MEMS, RF Phase Shifters, Electronic Scanning Antenna, Micro/Nano Antenna, Micro-optic devices, and devices utilizing ferroelectric lead zirconate titanate (PZT), AlN and ZnO thin films. ARL is fully equipped with state-of-the-art deposition, etching and lithography equipment, and leading cutting edge research in thin-film of PZT, AlN, ZnO, and Refractory Metals, and operates a world class MEMS/NEMS sensors and actuators prototyping facility for bulk and surface micromachining of PZT, AlN, Si, GaAs, SiC, GaN, HTSC, and refractory materials. One of the most modern and advanced facilities and expertise are also available for advanced atomic-scale microanalysis of materials and devices, characterization of RF, acoustic, optical devices and materials.